KLA-Tencor provides a portfolio of defect inspection tools and detection products to help LED manufacturers ramp production yields, improve quality, and enable a more cost-effective manufacturing process.
KLA-Tencor’s comprehensive LED process control tools and products helps drive down the cost per lumen by supporting:
- Quality control and process yield improvement starting from substrate growth, epitaxial process and patterning to dicing by monitoring surface pattern, as well as dicing defects, to maximize process tool performance and yield throughout manufacturing.
- Fast automated excursion defect inspection and detection to enable prompt corrective actions and reduce wafers-at-risk.
- Variable wafer size configurations (2” to 8”) to support different customer needs.